Electronic device comprising a semiconductor memory unit

ABSTRACT

Devices and methods based on disclosed technology include, among others, an electronic device capable of improving a signal transfer characteristic and a method for fabricating the same. Specifically, an electronic device in one implementation includes a plurality of buried gates formed in a substrate, open parts formed in the substrate on both sides of the buried gate, isolation layers each formed between a sidewall of the open part and a sidewall of the buried gate, source/drain regions formed in the substrate under the respective open parts, and contact plugs buried in the respective open parts.

CROSS-REFERENCE TO RELATED APPLICATION

The present application claims priority of Korean Patent Application No.10-2013-0023161, entitled “SEMICONDUCTOR DEVICE AND METHOD FORMANUFACTURING THE SAME, AND MICRO PROCESSOR, PROCESSOR, SYSTEM, DATASTORAGE SYSTEM AND MEMORY SYSTEM INCLUDING THE SEMICONDUCTOR DEVICE” andfiled on Mar. 5, 2013, which is incorporated herein by reference in itsentirety.

TECHNICAL FIELD

This patent document relates to memory circuits or devices and theirapplications in electronic devices or systems.

BACKGROUND

Recently, as electronic appliances trend toward miniaturization, lowpower consumption, high performance, multi-functionality, and so on,electronic devices capable of storing information in various electronicappliances such as a computer, a portable communication device, and soon have been demanded in the art, and research has been conducted forthe electronic devices. Such electronic devices include electronicdevices which can store data using a characteristic that they areswitched between different resistant states according to an appliedvoltage or current, for example, resistive random access memory (RRAM),phase-change random access memory (PRAM), ferroelectric random accessmemory (FRAM), magnetic random access memory (MRAM), an E-fuse, etc.

SUMMARY

The disclosed technology in this patent document includes memorycircuits or devices and their applications in electronic devices orsystems and various implementations of an electronic device using anelectronic device capable of improving a signal transfer characteristicand a method for fabricating the same.

In one aspect, an electronic device is provided to a semiconductormemory unit that may include a plurality of buried gates formed in asubstrate, open parts formed in the substrate on both sides of theburied gate, isolation layers each formed between a sidewall of the openpart and a sidewall of the buried gate, source/drain regions formed inthe substrate under the respective open parts, and contact plugs buriedin the respective open parts.

Implementations of the above electronic device may include one or morethe following.

The semiconductor memory unit may further include an ohmic contactlayers formed in the source/drain regions and exposed to the open parts.Each of the buried gates may comprise a trench formed in the substrate;a gate insulating layer formed on a surface of the trench; a gateelectrode formed over the gate insulating layer and configured to burypart of the trench; and a sealing layer formed over the gate electrodeand configured to bury the remaining trench. A bottom of the open partis lower than an interface where the gate electrode comes in contactwith the sealing layer. The isolation layer may comprise an insulatinglayer. The open parts may comprise: first open parts formed in thesubstrate on both sides of the buried gate and each configured to have afirst critical dimension; and second open parts formed under the firstopen parts and each configured to have a second critical dimensionsmaller than the first critical dimension. The isolation layer maycomprise a substrate remaining between a sidewall of the second openpart and a sidewall of the buried gate. Each of the contact plugs maycomprise a metallic layer. The electronic device may further comprise amicroprocessor which includes: a control unit configured to receive asignal including a command from an outside of the microprocessor, andperforms extracting, decoding of the command, or controlling input oroutput of a signal of the microprocessor; an operation unit configuredto perform an operation based on a result that the control unit decodesthe command; and a memory unit configured to store data for performingthe operation, data corresponding to a result of performing theoperation, or an address of data for which the operation is performed,wherein the semiconductor memory unit that includes the resistancevariable element is part of the memory unit in the microprocessor. Theelectronic device may further comprise a processor which includes: acore unit configured to perform, based on a command inputted from anoutside of the processor, an operation corresponding to the command, byusing data; a cache memory unit configured to store data for performingthe operation, data corresponding to a result of performing theoperation, or an address of data for which the operation is performed;and a bus interface connected between the core unit and the cache memoryunit, and configured to transmit data between the core unit and thecache memory unit, wherein the semiconductor memory unit that includesthe resistance variable element is part of the cache memory unit in theprocessor. The electronic device may further comprise a processingsystem which includes: a processor configured to decode a commandreceived by the processor and control an operation for information basedon a result of decoding the command; an auxiliary memory deviceconfigured to store a program for decoding the command and theinformation; a main memory device configured to call and store theprogram and the information from the auxiliary memory device such thatthe processor can perform the operation using the program and theinformation when executing the program; and an interface deviceconfigured to perform communication between at least one of theprocessor, the auxiliary memory device and the main memory device andthe outside, wherein the semiconductor memory unit that includes theresistance variable element is part of the auxiliary memory device orthe main memory device in the processing system. The electronic devicemay further comprise a data storage system which includes: a storagedevice configured to store data and conserve stored data regardless ofpower supply; a controller configured to control input and output ofdata to and from the storage device according to a command inputted forman outside; a temporary storage device configured to temporarily storedata exchanged between the storage device and the outside; and aninterface configured to perform communication between at least one ofthe storage device, the controller and the temporary storage device andthe outside, wherein the semiconductor memory unit that includes theresistance variable element is part of the storage device or thetemporary storage device in the data storage system. The electronicdevice may further comprise a memory system which includes: a memoryconfigured to store data and conserve stored data regardless of powersupply; a memory controller configured to control input and output ofdata to and from the memory according to a command inputted form anoutside; a buffer memory configured to buffer data exchanged between thememory and the outside; and an interface configured to performcommunication between at least one of the memory, the memory controllerand the buffer memory and the outside, wherein the semiconductor memoryunit that includes the resistance variable element is part of the memoryor the buffer memory in the memory system.

In another aspect an electronic device is provided to a semiconductormemory unit that may include a semiconductor memory unit that mayinclude word lines configured to include a plurality of buried gatesformed in a substrate, open parts formed in the substrate on both sidesof the buried gate, isolation layers each formed between a sidewall ofthe open part and a sidewall of the buried gate, source/drain regionsformed in the substrate under the respective open parts, contact plugsburied in the respective open parts, a source line coupled with thesource region, variable resistance elements coupled with the respectivedrain regions, and bit lines coupled with the respective variableresistance elements. The electronic device may further include ohmiccontact layers formed in the source/drain regions and exposed to theopen parts. Each of the buried gates may includes a trench formed in thesubstrate; a gate insulating layer formed on a surface of the trench; agate electrode formed over the gate insulating layer and configured tobury part of the trench; and a sealing layer formed over the gateelectrode and configured to bury the remaining trench. A bottom of theopen part may be lower than an interface where the gate electrode comesin contact with the sealing layer. The isolation layer may include aninsulating layer. The open parts may includes first open parts formed inthe substrate on both sides of the buried gate and each configured tohave a first critical dimension; and second open parts formed under thefirst open parts and each configured to have a second critical dimensionsmaller than the first critical dimension. The isolation layer mayinclude a substrate remaining between a sidewall of the second open partand a sidewall of the buried gate. Each of the contact plugs mayincludes a metallic layer. Each of the variable resistance elements mayincludes a stack layer having a tunnel barrier layer interposed betweentwo magnetic material layers. Each of the variable resistance elementsmay include metal oxide. Each of the variable resistance elements mayincludes phase-change materials.

In another aspect, a method is provided for fabricating an electronicdevice having a semiconductor memory unit. This method includes forminga plurality of buried gates in a substrate, forming first open parts,each having a first critical dimension, by etching the substrate on bothsides of the buried gate, forming spacers on both sidewalls of the firstopen part; forming second open parts, each having a second criticaldimension smaller than the first critical dimension, by etching thesubstrate under the first open parts using the spacers as etch barriers;forming source/drain regions in the substrate under the second openparts, and forming contact plugs configured to bury the first and thesecond open parts. The method may further include forming ohmic contactlayers in surfaces of the source/drain regions exposed to the secondopen parts before forming the contact plugs. The forming of the ohmiccontact layers may includes forming discontinuous metal-containinglayers on an entire surface of the substrate; forming silicide in thesource/drain regions coming in contact with the metal-containing layersby performing anneal; and removing metal-containing layers that have notreacted. The forming of the discontinuous metal-containing layers on theentire surface of the substrate may be performed using a physical vapordeposition method. The forming of the buried gates may includes: formingtrenches by selectively etching the substrate; forming a gate insulatinglayer on a surface of each of the trenches; forming a gate electrodeformed over the gate insulating layer and configured to bury part of thetrench; and forming sealing layers each formed over the gate electrodeand configured to bury a remaining trench. The forming of the first openparts may includes forming the first open parts so that a bottom of thefirst open part is higher than an interface where the gate electrodecomes in contact with the sealing layer. The forming of the second openparts may includes forming the second open parts so that a bottom of thesecond open part is lower than an interface where the gate electrodecomes in contact with the sealing layer. The forming of the second openparts may includes forming the second open parts so that the substrateremains between a sidewall of the second open part and a sidewall of theburied gate. Each of the contact plugs may includes a metallic layer.

In another aspect, a method is provided for fabricating an electronicdevice having a semiconductor memory unit. This method includes: forminga plurality of buried gates in a substrate, forming open parts byetching the substrate on both sides of the buried gate, formingisolation layers on both sidewalls of the open part, formingsource/drain regions in the substrate under the open parts, and formingcontact plugs each configured to bury the open part. The method mayfurther include forming ohmic contact layers in surfaces of thesource/drain regions exposed to the second open parts before forming thecontact plugs. The forming of the buried gates may includes formingtrenches by selectively etching the substrate; forming a gate insulatinglayer on a surface of each of the trench; forming a gate electrodeformed over the gate insulating layer and configured to bury part of thetrench; and forming sealing layers each formed over the gate electrodeand configured to bury a remaining trench. The forming of the open partsmay includes forming the open parts so that a bottom of the open part islower than an interface where the gate electrode comes in contact withthe sealing layer. Each of the isolation layers may includes aninsulating layer. Each of the contact plugs may includes a metalliclayer.

In another aspect, an electronic device is provided to include asemiconductor memory unit that includes: a substrate; word linesincluding a plurality of buried gates formed in the substrate; openparts formed in the substrate on two opposing sides of the buried gates;isolation layers formed in the open parts, each isolation layer formedbetween a sidewall of an open part and a sidewall of a correspondingburied gate; source and drain regions formed in the substrate underrespective open parts; contact plugs buried in respective open parts; asource line coupled with the source regions; variable resistanceelements coupled with respective drain regions; and bit lines coupledwith respective variable resistance elements.

In yet another aspect, an electronic device is provided to include asemiconductor circuit that includes: a substrate; trenches formed in thesubstrate; conductors located inside the trenches, respectively, to formgate electrodes buried inside the trenches; source and drain regionsformed in the substrate and adjacent to the trenches; open parts formedabove the source and drain regions on opposing sides of each of the gateelectrodes buried inside respective trenches; isolation layers formedinside the open parts and above respective source and drain regions,each isolation layer formed between a sidewall of an open part and asidewall of a gate electrode; and contact plugs buried inside the openparts to provide electrical contacts with the source and drain regions,respectively, wherein a gate electrode buried in side a trench andadjacent source and drain regions form a transistor.

These and other aspects, implementations and associated advantages aredescribed in greater detail in the drawings, the description and theclaims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 and 2 are cross-sectional views of an electronic deviceincluding buried gates.

FIG. 3 is a cross-sectional view of an electronic device includingburied gates in accordance with an implementation of this patentdocument.

FIGS. 4A to 4G are process-sectional views illustrating a method forfabricating an electronic device including buried gates in accordancewith an implementation of this patent document.

FIG. 5 is a cross-sectional view of an electronic device includingburied gates in accordance with another implementation of this patentdocument.

FIGS. 6A to 6E are process-sectional views illustrating a method forfabricating an electronic device including buried gates in accordancewith another implementation of this patent document.

FIGS. 7A and 7B are diagrams showing an electronic device in accordancewith an implementation of this patent document.

FIG. 8 is an example of configuration diagram of a microprocessorimplementing memory circuitry based on the disclosed technology.

FIG. 9 is an example of configuration diagram of a processorimplementing memory circuitry based on the disclosed technology.

FIG. 10 is an example of configuration diagram of a system implementingmemory circuitry based on the disclosed technology.

FIG. 11 is an example of configuration diagram of a data storage systemimplementing memory circuitry based on the disclosed technology.

FIG. 12 is an example of configuration diagram of a memory systemimplementing memory circuitry based on the disclosed technology.

DETAILED DESCRIPTION

Various examples and implementations of the disclosed technology aredescribed below in detail with reference to the accompanying drawings.

The drawings may not be necessarily to scale and in some instances,proportions of at least some of structures in the drawings may have beenexaggerated in order to clearly illustrate certain features of thedescribed examples or implementations. In presenting a specific examplein a drawing or description having two or more layers in a multi-layerstructure, the relative positioning relationship of such layers or thesequence of arranging the layers as shown reflects a particularimplementation for the described or illustrated example and a differentrelative positioning relationship or sequence of arranging the layersmay be possible. In addition, a described or illustrated example of amulti-layer structure may not reflect all layers present in thatparticular multilayer structure (e.g. one or more additional layers maybe present between two illustrated layers). As a specific example, whena first layer in a described or illustrated multi-layer structure isreferred to as being “on” or “over” a second layer or “on” or “over” asubstrate, the first layer may be directly formed on the second layer orthe substrate but may also represent a structure where one or more otherintermediate layers may exist between the first layer and the secondlayer or the substrate.

The following implementations of the disclosed technology in this patentdocument can be used to provide an electronic device capable ofimproving a signal transfer characteristic and a method for fabricatingthe electronic device. More particularly, the implementations in thispatent document can provide an electronic device capable of improving asignal transfer characteristic between a structure coupled with a sourceregion and a structure coupled with a drain region through the sourceregion, a channel region, and the drain region in the electronic deviceincluding buried gates and a method for fabricating the electronicdevice. To this end, the implementations in this patent document canprovide an electronic device capable of reducing the resistance ofcontact parts including source/drain regions and contact plugs and amethod for fabricating the electronic device.

For reference, a buried gate formed by burying a gate in a substrate canbe used to improve several device characteristics and processimplementations due compact nature or fineness in an electronic devicefabrication process. A buried gate can be advantageously implemented ina cell architecture having a higher degree of integration than a planargate (PG) or recess gate (RG) and a process of forming contact plugs anda process of forming conductive lines including bit lines and a sourceline are easier to implement than circuits based on other gatestructures. Furthermore, the buried gate is advantageous in achieving asimpler structure and formation process than a vertical gate (VG)structure. Accordingly, the availability of a buried gate in variouscircuits can be beneficial in practical electronic devices.

Prior to a description of the implementations of this patent document,an electronic device to be compared with the implementations isdescribed below with reference to FIGS. 1 and 2.

FIGS. 1 and 2 are cross-sectional view of an electronic device includingburied gates.

As shown in FIG. 1, first, a plurality of buried gates BG formed in asubstrate 11 in which an active region 13 is defined by isolation layers12. Each of the buried gates includes a trench 14 formed in thesubstrate 11, a gate insulating layer (not shown) formed on a surface ofthe trench 14, a gate electrode 15 formed on the gate insulating layerand configured to bury or fill up part of the trench 14, and a sealinglayer 16 formed over the gate electrode 15 and configured to bury orfill up the remaining trench 14.

Source and drain regions 18 and 19, that partially overlap with the gateelectrodes 15 laterally, are formed in the active region 13 on bothopposing sides of the buried gate BG. A transistor is formed by a buriedgate and adjacent source and drain regions. In various applications,such a transistor can be electrically coupled to a circuit element aspart of the circuitry of the circuit element, e.g., a memory cell. Thesource and drain regions 18 and 19 for transistors can be formed by,e.g., an impurity ion implantation process. The resistance of the sourceand drain regions 18 and 19 is reduced by a method of increasing theimpurity doping concentrations of the source and drain regions 18 and 19by increasing the amount of implanted impurities (or a dose) whenimplanting the impurity ions.

However, a reduction in the resistance of the source and drain regions18 and 19 is limited because the impurity doping concentrations of thesource and drain regions 18 and 19 cannot be increased to or above aspecific level due to limited solid solubility although the amount ofimplanted impurities is increased when implanting impurity ions. For atleast this reason, there is a disadvantage in that a signal transfercharacteristic transferred to a structure coupled with the source region18, for example, to a structure coupled with the drain region 19 via thesource region 18 and a channel region from a source line (not shown),for example, to storage (not shown) for storing logic information isdeteriorated.

In order to address this problem, contact plugs having a lowerresistance than the source and drain regions 18 and 19 formed by theimpurity ion implantation can be formed in the source and drain regions18 and 19. This technique is described with reference to FIG. 2.

As shown in FIG. 2, open parts 20 are formed by recessing the activeregion 13 using the isolation layers 12 and the sealing layers 16 asetch barriers. The source and drain regions 18 and 19 are formed in theactive region 13 under the open parts 20 by way of impurity ionimplantation. Contact plugs 22 having a lower resistance than the sourceand drain regions 18 and 19 are buried within the respective open parts20. Furthermore, an ohmic contact layer 21 is formed between the contactplug 22 and the source region 18 and between the contact plug 22 and thedrain region 19. As compared with the electronic device of FIG. 1, inthe electronic device of FIG. 2, the volume of the source or drainregion 18 or 19 is reduced, and an improved signal transfercharacteristic can be implemented because the contact plugs 22corresponding to the reduced volume are formed.

If the ohmic contact layer 21 laterally overlaps with the gate electrode15 and the contact plug 22 laterally overlaps with the gate electrode 15and thus the ohmic contact layer 21 and the contact plug 22 come incontact with the gate insulating layer, however, there is a disadvantagein that reliability, such as a reduction in the breakdown voltage of theelectronic device, is deteriorated. As a result, the improvement of asignal transfer characteristic is limited because the bottom of the openpart 20 in which the contact plug 22 is buried cannot be placed deepunder an interface where the gate electrode 15 comes in contact with thesealing layer 16.

The following implementations and examples are provided based on thedisclosed technology to improve a signal transfer characteristic inaforementioned electronic devices in FIGS. 1 and 2.

FIG. 3 is a cross-sectional view of an electronic device includingburied gates in accordance with an implementation of this patentdocument.

As shown in FIG. 3, the electronic device includes a plurality of buriedgates BG formed in a substrate 101, open parts 111 formed in thesubstrate 101 on both sides of the buried gate BG, isolation layers 116disposed between the sidewalls of the open parts 111 and the sidewallsof the buried gates BG, source/drain regions 112 and 113 formed in thesubstrate 101 under the open parts 111, ohmic contact layers 114 formedin surfaces of the source/drain regions 112 and 113 which are exposed tothe open parts 111, and contact plugs 115 buried in the respective openparts 111.

The substrate 101 can include single crystalline materials. Thesubstrate 101 can further include silicon-containing materials. As aresult, the substrate 101 can include single crystalline silicon.Furthermore, the substrate 101 can include active regions 103 isolatedfrom one another by the isolation layers 102. The isolation layers 102may have been formed by a shallow trench isolation (STI) process.

Each of the buried gates BG can include a trench 106 formed in thesubstrate 101, a gate insulating layer (not shown) formed on a surfaceof the trench 106, a gate electrode 107 formed on the gate insulatinglayer and configured to bury or fill up part of the trench 106, and asealing layer 108 formed over the gate electrode 107 and configured tobury or fill up the remaining trench 106. The trenches 106 can have aline pattern that intersects both the isolation layers 102 and theactive region 103. The trenches 106 can include first trenches 104formed in the active region 103 and second trenches 105 formed in theisolation layers 102. The first trench 104 can have the same depth asthe second trench 105, or the second trench 105 can have a greater depththan the first trench 104. If the second trench 105 has a greater depththan the first trench 104, gate control capability can be increasedbecause the active region 103 under the first trenches 104 has a finstructure. The gate electrode 107 can include a metallic layer. Themetallic layer is a conductive layer including metal, and the metalliclayer can include a metal layer, a metal oxide layer, a metal nitridelayer and so on. The sealing layer 108 can include an insulating layer.

Each of the open parts 111 can include a first open part 109 configuredto have a first critical dimension CD1 and a second open part 110 formedunder the first open part 109 and configured to have a second criticaldimension CD2 than the first critical dimension CD1. The substrate 101remains between the sidewalls of the second open part 110 and thesidewalls of the buried gate BG, and the remaining substrates 101function as the isolation layers 116. The isolation layer 116 functionsto separate the contact plug 115 and the buried gate BG, in particular,the contact plug 115 and the gate electrode 107.

In some implementations, the first critical dimension CD1 of the firstopen part 109 can be identical to an interval between the buried gatesBG, and the bottom of the first open part 109 can be higher than aninterface where the gate electrode 107 comes in contact with the sealinglayer 108. In this case, a signal transfer characteristic can beimproved and the contact plug 115 can be prevented from overlapping withthe gate electrode 107 in a lateral direction because a maximum spacewhere the contact plug 115 can be formed is provided. The secondcritical dimension CD2 of the second open part 110 is for forming theisolation layer 116 including the substrate 101. Furthermore, the bottomof the second open part 110 can be lower than an interface where thegate electrode 107 comes in contact with the sealing layer 108. In thiscase, a signal transfer characteristic can be improved because the depthof the open part 111 is increased and thus a maximum space where thecontact plug 115 is formed can be provided.

The source/drain regions 112 and 113 are formed in the substrate 101under the second open part 110 having a bottom lower than an interfacewhere the gate electrode 107 comes in contact with the sealing layer108. The source/drain regions 112 and 113 are configured to overlap withthe gate electrodes 107 in a lateral direction. Since the source/drainregions 112 and 113 are formed in the substrate 101 under the secondopen parts 110, the volume of the source or drain region 112 or 113 canbe reduced comparison with the electronic devices of FIGS. 1 and 2. As aresult, a signal transfer characteristic can be effectively improved.The source/drain regions 112 and 113 can be impurity regions formed bydoping impurities into the substrate 101.

The ohmic contact layer 114 functions to reduce contact resistancebetween the contact plug 115 and the source or drain region 112 or 113and can include silicide. More particularly, in some implementations,the ohmic contact layer 114 can include a suitable material such as asilicide including a near-noble metal or refractory metal, such astitanium silicide (TiSi_(x)), tungsten silicide (WSi_(x)), cobaltsilicide (CoSi_(x)), and nickel silicide (NiSi_(x)).

The contact plug 115 buried in the first open part 109 and the secondopen part 110 includes materials having lower resistance than those ofthe source/drain regions 112 and 113. More particularly, the contactplug 115 can be formed of a metallic layer.

In such an electronic device, the isolation layers 116 are disposedbetween the sidewalls of the second open part 110 having a bottom lowerthan an interface where the gate electrode 107 comes in contact with thesealing layer 108 and the sidewalls of the buried gate BG. Accordingly,since the depth of the open part 111 in which the contact plug 115 isformed is increased, a signal transfer characteristic can be improved,and the deterioration of the characteristics of the electronic deviceand a reduction in the reliability of the electronic device attributableto the contact plug 115 can be prevented.

FIGS. 4A to 4G are process-sectional views illustrating a method forfabricating an electronic device including buried gates in accordancewith one implementation. An example of a method for fabricating anelectronic device having the structure of FIG. 3 is described below withreference to FIGS. 4A to 4G.

As shown in FIG. 4A, isolation layers 32 that define an active region 33are formed in a substrate 31. The substrate 31 can include singlecrystalline materials. The substrate 31 can further includesilicon-containing materials. For example, the substrate 31 can includesingle crystalline silicon. The isolation layers 32 can be formed by ashallow trench isolation (STI) process and can include, e.g., an oxidelayer or a nitride layer.

A plurality of trenches 36 is formed by selectively etching thesubstrate 31. The etch process for forming the trenches 36 can includeanisotropic etch. The trenches 36 can have a line pattern thatintersects both the active region 33 and the isolation layers 32. Here,the trenches 36 can include first trenches 34 formed in the activeregion 33 and second trenches 35 formed in the isolation layers 32, andthe second trench 35 can have a greater depth than the first trench 34.If the second trench 35 has a greater depth than the first trench 34,the active region 33 having a fin structure under the first trenches 34can be formed.

A gate insulating layer (not shown) is formed on the trench 36. The gateinsulating layer can be formed of an oxide layer. The gate insulatinglayer can be formed by an oxidization process including thermaloxidization or radical oxidization.

Next, gate electrodes 37, each burying part of the trench 36, areformed. The gate electrodes 37 are formed to cover the active region 33having a fin structure under the first trenches 34 in such a way as tobury both the first trenches 34 and the second trenches 35, therebybeing capable of improving gate control capability.

The gate electrode 37 can include a metallic layer. The metallic layercan be a conductive layer containing metal and can include a metallayer, a metal oxide layer, and a metal nitride layer. The gateelectrodes 37 can be formed by a series of processes of forming a gateconductive layer on the entire surface of the substrate 31 so that thetrenches 36 are partially buried with the gate conductive layer and thensequentially a polishing process and a blanket etch process. Thepolishing process can be performed using a chemical mechanical polishing(CMP) method, and the blanket etch process can be performed usingetch-back.

Sealing layers 38, each burying the remaining trench 36, are formed overthe respective gate electrodes 37. The sealing layer 38 can include aninsulating layer. The sealing layer 38 can be formed of a single layeror a stack layer of two or more layers by using an oxide layer, anitride layer, or an oxide nitride layer. The sealing layer 38 can beformed by a series of processes of forming an insulating layer on theentire surface of the substrate 31 so that the trenches 36 are buriedwith the insulating layer and then performing a polishing process untila surface of the substrate 31 is exposed. The polishing process can beperformed using a chemical mechanical polishing (CMP) method oretch-back.

Upon completion of the above processing, a plurality of buried gates BGcan be formed and each such BG includes the trench 36, the gateinsulating layer (not shown), the gate electrode 37, and the sealinglayer 38.

As shown in FIG. 4B, first open parts 39 are formed by recessing thesubstrate 31 using the isolation layers 32 and the sealing layers 38 asetch barriers. The bottom 39A of the first open part 39 is formed to behigher than an interface where the sealing layer 38 comes in contactwith the gate electrode 37. The first open part 39 has a first criticaldimension CD1.

Spacers 40 are formed on both sidewalls of the first open part 39. Thespacer 40 can be formed of an insulating layer. The spacer 40 caninclude an oxide layer, a nitride layer, an oxide nitride layer, or acarbon-containing layer. The spacer 40 is made of materials having etchselectivity to the isolation layer 32 and the sealing layer 38. Forexample, the spacer 40 can be formed of a carbon-containing layer, andthe carbon-containing layer can be an amorphous carbon layer.

The spacers 40 can be formed by forming an insulating layer having aconstant thickness on a surface of the structure including the firstopen parts 39 and then performing a blanket etch process, for example,etch-back.

As shown in FIG. 4C, second open parts 41 are formed by etching thesubstrate 31 using the spacers 40 as etch barriers. Each of the secondopen parts 41 is coupled with the first open part 39, and the bottom 41Aof the second open part 41 can be formed to be identical with or lowerthan an interface where the sealing layer 38 comes in contact with thegate electrode 37.

The second open part 41 has a second critical dimension CD2 smaller thanthe first critical dimension CD1 of the first open part 39. Since thesecond open part 41 has the second critical dimension CD2 smaller thanthe first critical dimension CD1, the substrate 31 remains between thesidewalls of the open part and the sidewalls of the buried gate BG. Thesubstrate 31 that remains between the sidewalls of the second open parts41 and the sidewalls of the buried gates BG, in particular, thesubstrate 31 that remains between the sidewalls of the second open parts41 and the sidewalls of the gate electrode 37 functions as an isolationlayer for isolating a contact plug to be formed by a subsequent processfrom the gate electrode 37. Accordingly, reliability of the electronicdevice can be improved.

As shown in FIG. 4D, a source region 42 and drain regions 43 are formedby implanting ion impurities into the active region 33 under the secondopen parts 41 and then performing annealing. N-type impurities, such asphosphorous (P) or arsenic (As), or P-type impurities, such as boron(B), can be used as the impurities for forming the source and drainregions 42 and 43. The impurities for forming the source and drainregions 42 and 43 can be selected depending on the characteristics of anelectronic device. The annealing for activating the implanted impuritiescan be rapid thermal anneal. The source and drain regions 42 and 43 areconfigured to partially overlap with the gate electrodes 37 in a lateraldirection.

The volume of the source or drain region 42 or 43 can be reduced incomparison with the devices in FIGS. 1 and 2 because the source anddrain regions 42 and 43 are formed after forming the second open parts41. This means that a space where a contact plug will be formed by asubsequent process is increased. That is, a signal transfercharacteristic of the electronic device can be improved because a spacewhere a contact plug including materials having lower resistance thanthose of the source or drain region 42 or 43 will be formed isincreased.

As shown in FIG. 4E, discontinuous metal-containing layers 44 are formedon the entire surface of the substrate 31. The reason why themetal-containing layers 44 are discontinuously formed is to form ohmiccontact layers only in the source and drain regions 42 and 43 under thesecond open parts 41. In some implementations, the metal-containinglayers 44 can be formed using a physical vapor deposition (PVD) methodcapable of easily controlling step coverage.

The metal-containing layer 44 can include metal, such as near-noblemetal or refractory metal. More particularly, the metal-containing layer44 can include cobalt (Co), titanium (Ti), tantalum (Ta), nickel (Ni),tungsten (W), platinum (Pt), or palladium (Pd).

As shown in FIG. 4F, silicide is formed on surfaces of the source anddrain regions 42 and 43, exposed to the second open parts 41, byperforming anneal. The silicides function as ohmic contact layers 45.Here, the process time is controlled such that the ohmic contact layer45 does not come in contact with the gate insulating layer (not shown)that comes in contact with the gate electrode 37. That is, the processtime is controlled so that the substrate 31 functioning as the isolationlayer remains between the sidewalls of the ohmic contact layer 45 andthe gate electrode 37. In this case, the ohmic contact layer 45 canprevent the characteristics of the gate insulating layer from beingdeteriorated. Furthermore, the ohmic contact layer 45 can preventreliability of the electronic device from being deteriorated.

The annealing can be a rapid thermal annealing process and can beperformed at a different temperature depending on the type (ormaterials) of metal-containing layer 44 and substrate 31. In someimplementations, the annealing may be performed several times atdifferent temperatures depending on the type (or materials) ofmetal-containing layer 44 and substrate 31.

Next, the metal-containing layers 44 that have not reacted are removed.The metal-containing layers 44 that have not reacted can be removedusing a mixed chemical of sulphuric acid (H₂SO₄) and hydrogen peroxide(H₂O₂).

In the process of forming the metal-containing layers 44, themetal-containing layer 44 may also be deposited on the sidewalls of thesecond open parts 41. However, although the metal-containing layer 44 isdeposited on the sidewalls of the second open parts 41, the thickness ofthe metal-containing layer 44 tends to be small because themetal-containing layers 44 are discontinuously formed using a physicalvapor deposition method. Accordingly, although the silicide is formed onthe sidewalls of the second open parts 41, the silicide is a negligiblelevel in terms of a characteristic because the thickness of the silicideis very small. As a result, the substrate 31 functioning as theisolation layers still remains between the sidewalls of the second openparts 41 and the sidewalls of the buried gates BG.

As shown in FIG. 4G, the spacers 40 are removed in order to increase aspace where a contact plug 46 will be formed. The spacers 40 can beremoved by wet etch or dry etch.

Next, the plurality of contact plugs 46 is formed by forming conductivematerials on the entire surface of the substrate 31 so that the firstopen parts 39 and the second open parts 41 are buried or filled up andthen a polishing process is performed to expose the sealing layers 38.The polishing process can be performed using a chemical mechanicalpolishing (CMP) method. The contact plug 46 is made of conductivematerials having lower resistance than the source or drain region 42 or43. More particularly, the contact plug 46 can be formed of a metalliclayer.

The volume of the contact plug 46 can be significantly increased incomparison with the devices in FIGS. 1 and 2 because the contact plug 46is configured to bury the first open part 39 and the second open part41, with the result that a signal transfer characteristic of theelectronic device can be improved. Furthermore, since the substrate 31functioning as the isolation layers remains between the sidewalls of thesecond open parts 41 and the sidewalls of the buried gates BG, reductioncan be achieved in the deterioration of the characteristics of theelectronic device that may occur because the ohmic contact layer 45 andthe contact plug 46 come in contact with the gate electrode 37.

FIG. 5 is a cross-sectional view of an electronic device includingburied gates in accordance with another implementation.

As shown in FIG. 5, the electronic device includes a plurality of buriedgates BG formed in a substrate 201, open parts 209 formed in thesubstrate 201 on both sides of the buried gate BG, isolation layers 212formed on the sidewalls of the open parts 209 and the sidewalls of theburied gates BG, source and drain regions 210 and 211 formed in thesubstrate 201 under the open parts 209, ohmic contact layers 213 formedin surfaces of the source and drain regions 210 and 211 exposed to theopen parts 209, and contact plugs 214 buried in the respective openparts 209.

The substrate 201 can include single crystalline materials. Thesubstrate 201 can further include silicon-containing materials. Forexample, the substrate 201 can include single crystalline silicon. Thesubstrate 201 can further include active regions 203 isolated from oneanother by isolation layers 202. The isolation layers 202 may have beenformed by a shallow trench isolation (STI) process.

Each of the buried gates BG can include a trench 206 formed in thesubstrate 201, a gate insulating layer (not shown) formed on a surfaceof the trench 206, a gate electrode 207 formed on the gate insulatinglayer and configured to bury or fill up part of the trench 206, and asealing layer 208 formed over the gate electrode 207 and configured tobury or fill up the remaining trench 206. The trenches 206 can have aline pattern that intersects both the isolation layers 202 and theactive region 203. The trenches 206 can include first trenches 204formed in the active region 203 and second trenches 205 formed in theisolation layers 202. The first trench 204 can have the same depth asthe second trench 205, or the second trench 205 can have a greater depththan the first trench 204. If the second trench 205 has a greater depththan the first trench 204, gate control capability can be increasedbecause the active region 203 under the first trenches 204 has a finstructure. The gate electrode 207 can include a metallic layer, and thesealing layer 208 can include an insulating layer.

A critical dimension of the open part 209 can be identical with aninterval between the buried gates BG, and the bottom of the open part209 can be lower than an interface where the gate electrode 207 comes incontact with the sealing layer 208. In this case, a signal transfercharacteristic can be improved because a maximum space where the contactplug 214 will be formed is provided.

Although the bottom of the open part 209 is lower than the interfacewhere the gate electrode 207 comes in contact with the sealing layer208, the isolation layers 212 formed on the sidewalls of the open part209 can prevent the deterioration of characteristics and reliability,which is attributable to the overlapping of the contact plug 214 withthe gate electrode 207 in a lateral direction. Accordingly, theisolation layer 212 can include an insulating layer. The insulatinglayer can include an oxide layer, a nitride layer, or an oxide nitridelayer. Here, in order to reduce parasitic capacitance between the gateelectrode 207 and the contact plug 214, the isolation layer 212 can bean insulating layer having a low dielectric constant. The insulatinglayer having a low dielectric constant has a lower dielectric constantthan a silicon oxide layer.

The source and drain regions 210 and 211 are formed in the substrate 201under the open parts 209 having bottoms that are lower than theinterfaces where the gate electrodes 207 come in contact with thesealing layers 208. The source and drain regions 210 and 211 areconfigured to overlap with the gate electrodes 207 in a lateraldirection. The volume of the source or drain region 210 or 211 can beminimized as compared with the comparison example because the source anddrain regions 210 and 211 are formed in the substrate 201 under the openparts 209, thereby being capable of improving a signal transfercharacteristic more effectively. The source and drain regions 210 and211 can be impurity regions formed by doping impurities into thesubstrate 201.

The ohmic contact layer 213 functions to reduce contact resistancebetween the contact plug 214 and the source or drain region 210 or 211and can include silicide. The ohmic contact layer 213 can includesilicide including near-noble metal and refractory metal, such astitanium silicide (TiSi_(x)), tungsten silicide (WSi_(x)), cobaltsilicide (CoSi_(x)), and nickel silicide (NiSi_(x)).

The contact plug 214 buried in the open part 209 includes a materialhaving a lower resistance than those of the source or drain region 210or 211. More particularly, the contact plug 214 can be formed of ametallic layer.

The electronic device includes the isolation layers 212 between thesidewalls of the open parts 209, each having a bottom lower than theinterface where the gate electrode 207 comes in contact with the sealinglayer 208, and the sidewalls of the buried gates BG. Accordingly, asignal transfer characteristic can be improved and the deterioration ofcharacteristics and reliability of the electronic device attributable tothe contact plug 214 can also be prevented because the depth of the openpart 209 where the contact plug 214 is formed is increased.

FIGS. 6A to 6E are process-sectional views illustrating a method forfabricating an electronic device including buried gates in accordancewith another implementation. An example of a method for fabricating anelectronic device having the structure of FIG. 5 is described below withreference to FIGS. 6A to 6E.

As shown in FIG. 6A, isolation layers 52 that define an active region 53are formed in a substrate 51. The substrate 51 can include singlecrystalline silicon. The isolation layers 52 can be formed by a shallowtrench isolation (STI) process and can include an oxide layer or anitride layer.

A plurality of trenches 56 is formed by selectively etching thesubstrate 51. The etch process for forming the trenches 56 can includeanisotropic etch. The trenches 56 can have a line pattern thatintersects both the active region 53 and the isolation layers 52. Thetrenches 56 can include first trenches 54 formed in the active region 53and second trenches 55 formed in the isolation layers 52. The secondtrench 55 can have a greater depth than the first trench 54. If thesecond trench 55 has a greater depth than the first trench 54, theactive region 53 having a fin structure under the first trenches 54 canbe formed.

A gate insulating layer (not shown) is formed on a surface of each ofthe trenches 56. The gate insulating layer can be formed of an oxidelayer. The gate insulating layer can be formed by an oxidization processincluding thermal oxidization or radical oxidization.

Next, gate electrodes 57, each burying part of the trench 56, areformed. Gate control capability can be improved because the gateelectrodes 57 are configured to cover the active region 53 having a finstructure under the first trenches 54 in such a way as to bury or fillup both the first trenches 54 and the second trenches 55.

The gate electrode 57 can include a metallic layer. The gate electrode57 can be formed by a series of processes for forming a gate conductivelayer on the entire surface of the substrate 51 so that the trenches 56are buried and then sequentially performing a polishing process and ablanket etch process. The polishing process can be performed using achemical mechanical polishing (CMP) method, and the blanket etch processcan be performed using etch-back.

Next, sealing layers 58, each burying or filling up the remaining trench56, are formed over the respective gate electrodes 57. The sealing layer58 can include an insulating layer. The sealing layer 58 can be formedof a single layer or a stack layer of two or more layers by using anoxide layer, a nitride layer, or an oxide nitride layer. The sealinglayer 58 can be formed by a series of processes for forming aninsulating layer on the entire surface of the substrate 51 so that thetrenches 56 are buried or filled up and then a polishing process can beperformed to expose a surface of the substrate 51. The polishing processcan be performed using a chemical mechanical polishing (CMP) method oretch-back.

Upon completion of the above processing, the plurality of buried gatesBG are formed and each BG includes the trench 56, the gate insulatinglayer (not shown), the gate electrode 57, and the sealing layer 58.

As shown in FIG. 6B, open parts 59 are formed by recessing the substrate51 using the isolation layers 52 and the sealing layers 58 as etchbarriers. Here, the bottom 59A of the first open part 59 is formed to belower than the sealing layer 58 comes in contact with the gate electrode57. In this case, the volume of a source region or a drain region to beformed in a subsequent process can be reduced, and the volume of acontact plug having low resistance can be maximized by the reducedvolume of the source region or the drain region.

Spacers 60 are formed on both sidewalls of the open part 59. The spacer60 functions to separate an ohmic contact layer and a contact plug to beformed in a subsequent process from the buried gate BG. In particular,the spacer 60 functions as an isolation layer for separating the gateelectrodes 57. To this end, the spacer 60 can be formed of an insulatinglayer. The spacer 60 can include an oxide layer, a nitride layer, or anoxide nitride layer. The spacers 60 can be formed by forming aninsulating layer having a constant thickness on a surface of thestructure including the open parts 59 and then performing a blanket etchprocess, for example, etch-back.

As shown in FIG. 6C, source and drain regions 61 and 62 are formed byion-implanting impurities into the active region 53 under the open parts59 and then performing anneal. N-type impurities, such as phosphorous(P) or arsenic (As), or P-type impurities, such as boron (B), can beused as the impurities for forming the source and drain regions 61 and62. The impurities for forming the source and drain regions 61 and 62can be selected depending on the characteristics of an electronicdevice. The anneal for activating the implanted impurities can be rapidthermal anneal. The source and drain regions 61 and 62 are configured topartially overlap with the gate electrodes 57 in a lateral direction.

The volume of the source or drain region 61 or 62 can be reduced ascompared with the comparison example because the source and drainregions 61 and 62 are formed after forming the open parts 59. This meansthat a space where a contact plug will be formed by a subsequent processis increased. That is, a signal transfer characteristic of theelectronic device can be improved because a space where a contact plugincluding materials having lower resistance than those of the source ordrain region 61 or 62 is increased.

As shown in FIG. 6D, ohmic contact layers 63 are formed in surfaces ofthe source and drain regions 61 and 62 exposed to the open parts 59. Theohmic contact layer 63 can include silicide.

The ohmic contact layers 63 can be formed by a series of processes forforming a metal-containing layer (not shown) on a surface of thesubstrate 51, forming silicide by a reaction of the metal-containinglayer with the substrate 51 through anneal, and then removing themetal-containing layer that has not reacted. The metal-containing layercan include metal, such as a near-noble metal or refractory metal. Moreparticularly, the metal-containing layer can include cobalt (Co),titanium (Ti), tantalum (Ta), nickel (Ni), tungsten (W), platinum (Pt),or palladium (Pd). The annealing can be a rapid thermal annealingprocess and can be performed at a different temperature depending on thetype (or materials) of metal-containing layer and substrate 51. In someimplementations, the annealing may be performed several times atdifferent temperatures depending on the type (or materials) ofmetal-containing layer and substrate 51. The metal-containing layer thathas not reacted can be removed using a mixed chemical of sulphuric acid(H₂SO₄) and hydrogen peroxide (H₂O₂).

As shown in FIG. 6E, a plurality of contact plugs 64 is formed byforming conductive materials on the entire surface of the substrate 51so that the open parts 59 are buried or filled up and then a polishingprocess is performed to expose the sealing layers 58. The polishingprocess can be performed using a chemical mechanical polishing (CMP)method. The contact plug 64 is made of conductive materials having lowerresistance than those of the source or drain region 61 or 62. Moreparticularly, the contact plug 64 can be formed of a metallic layer.

The volume of the contact plug 64 can be significantly increased ascompared with the comparison example because the contact plug 64 isconfigured to bury the open part 59, with the result that a signaltransfer characteristic of the electronic device can be improved.Furthermore, since the spacers 60 functioning as isolation layers areformed between the sidewalls of the open parts 59 and the sidewalls ofthe buried gates BG, the deterioration of the characteristics of theelectronic device that may occur because the ohmic contact layer 63 andthe contact plug 64 come in contact with the gate electrode 57 can beprevented.

The disclosed buried gates in this document can be applied to variouselectronic devices, including an electronic device for storing data orinformation using a characteristic in which the electronic deviceswitches between different resistance states in response to voltage or acurrent. Such storage devices can be used in various electronic devicesor systems, such as computers and mobile communication devices, asdescribed below with reference to FIGS. 7A and 7B.

FIGS. 7A and 7B are diagrams showing an electronic device in which FIG.7A is a plan view of the electronic device, and FIG. 7B is across-sectional view of the electronic device taken along line A-A′ inFIG. 7A.

As shown in FIGS. 7A and 7B, an active region 103 is defined byisolation layers 102 formed in a substrate 101, and a plurality ofburied gates BG is formed in the substrate 101. The buried gates BG havea line form extending in one direction and function as word lines. Eachof the buried gate BG can include a trench 106 formed in the substrate101, a gate insulating layer (not shown) formed on a surface of thetrench 106, a gate electrode 107 formed on the gate insulating layer andconfigured to bury or fill up part of the trench 106, and a sealinglayer 108 formed on the gate electrode 107 and configured to bury orfill up the remaining trench 106.

Open parts 111, each including a first open part 109 and a second openpart 110, are formed in the substrate 101 on both side of the buriedgate BG. Isolation layers 116 are disposed between the sidewalls of theopen parts 111 and the sidewalls of the buried gates BG.

Source/drain regions 112 and 113 are formed in the substrate 101 underthe open parts 111. The source region 112 may be placed in the center ofthe active region 103, and the drain regions 113 may be placed at theedges of the active region 103 on both sides. Accordingly, the sourceregion 112 may be a common terminal.

Ohmic contact layers 114 are formed in surfaces of the source/drainregions 112 and 113 exposed to the respective open parts 111, andcontact plugs 115 are buried in the respective open parts 111. Thecontact plug 115 can include a metallic layer, and the ohmic contactlayer 115 can include a silicide.

A first interlayer insulating layer 307 is formed on the entire surfaceof the substrate 101. A source line 301 extended in a direction thatcrosses the buried gates BG is formed within the first interlayerinsulating layer 307. The source line 301 is coupled with the contactplug 115 coupled with the source region 112 and a first plug 304.Furthermore, second plugs 305 are formed within the first interlayerinsulating layer 307 and are configured to come in contact with thecontact plugs 115 coupled with the respective drain regions 113 throughthe first interlayer insulating layer 307.

Storage devices or elements 302 configured to come in contact with thesecond plugs 305 and a second interlayer insulating layer 308 configuredto cover the storages 302 are formed on the first interlayer insulatinglayer 307. Bit lines 309 extended in a direction that cross the buriedgates BG are formed on the second interlayer insulating layer 308 andare coupled with the respective storages 302 through third plugs 306.

Each storage device or element 302 functions to store logic informationand can include a variable resistance element. The variable resistanceelement can have a structure in which a first electrode, a variableresistance layer, and a second electrode are stacked. The variableresistance element can have a characteristic in which the variableresistance element switches between different resistance states (ordifferent resistance values) in response to a bias (for example, voltageor a current) applied through the first electrode or the secondelectrode or both.

The variable resistance layer in the storage device or element 302 has avariable resistance characteristic in response to a bias applied throughthe first electrode or the second electrode or both and can include asingle layer or multiple layers. For example, the variable resistancelayer can include phase-change materials. The phase-change materials caninclude a chalcogen compound. The phase-change materials have acrystalline state changed into an amorphous state or a crystal state inresponse to an external stimulus (for example, voltage or a current) andcan have a characteristic in which the phase-change materials switchbetween different resistance states. Furthermore, the variableresistance layer can include metal oxide. The metal oxide can includetransition metal oxide (TMO) or oxide based on perovskite or the like.The metal oxide includes intra-film vacancies and can have acharacteristic in which the metal oxide switches between differentresistance states depending on the creation and distinction of aconductive path according to the behavior of the vacancies in responseto an external stimulus. Furthermore, the variable resistance layer caninclude a stack layer in which a tunnel barrier layer is interposedbetween two magnetic material layers. The stack layer having the tunnelbarrier layer interposed between the two magnetic material layers isalso called a magnetic tunnel junction (MTJ). The stack layer having thetunnel barrier layer interposed between the two magnetic material layerscan have a characteristic in which the stack layer switches differentresistance states depending on magnetization directions of the twomagnetic material layers. For example, if the two magnetic materiallayers have the same magnetization direction (or have parallelmagnetization directions), the two magnetic material layers can have alow-resistance state. If the two magnetic material layers have differentmagnetization directions (or do not have parallel magnetizationdirections), the two magnetic material layers can have a high-resistancestate. The above MTJ structure is one of various implementations forachieving a variable resistance characteristic in which the variableresistance layer can switch between different resistance states inresponse to a bias applied to the first electrode or the secondelectrode or both. Other implementations are possible.

Most of electronic devices capable of storing information adopt a methodusing the storage of charges. The method using the storage of charges isreaching a limit due to a data error problem because the criticaldimension is reduced at high speed. In order to solve this problem, aresistance storage device for securing a sensing current using a changeof resistance is actively developed. The resistance storage device isdisadvantageous in that it has operating characteristics greatlydependent on resistance components of an element unlike a device forstoring logic information using charges.

If an electronic device including contact parts including thesource/drain regions 112 and 113 and the contact plugs 115 in accordancewith an implementation of this patent document is used, however,resistance of the contact part can be greatly reduced. In this case,operating characteristics can be significantly improved if theelectronic device is applied to a device using a change of resistance.

As described above, the depth of the open parts in which the contactplugs are formed can be increased because the isolation layers aredisposed between the sidewalls of the open parts and the sidewalls ofthe buried gates. Accordingly, this technology is advantageous in that asignal transfer characteristic can be improved and the deterioration ofcharacteristics and reliability attributable to the overlapping of thecontact plug with the buried gate can be prevented.

The above and other memory circuits or semiconductor devices based onthe disclosed technology can be used in a range of devices or systems.FIGS. 8-12 provide some examples of devices or systems that canimplement the memory circuits disclosed herein.

FIG. 8 is an example of configuration diagram of a microprocessorimplementing memory circuitry based on the disclosed technology.

Referring to FIG. 8, a microprocessor 1000 may perform tasks forcontrolling and tuning a series of processes of receiving data fromvarious external devices, processing the data, and outputting processingresults to external devices. The microprocessor 1000 may include amemory unit 1010, an operation unit 1020, a control unit 1030, and soon. The microprocessor 1000 may be various data processing units such asa central processing unit (CPU), a graphic processing unit (GPU), adigital signal processor (DSP) and an application processor (AP).

The memory unit 1010 is a part which stores data in the microprocessor1000, as a processor register, register or the like. The memory unit1010 may include a data register, an address register, a floating pointregister and so on. Besides, the memory unit 1010 may include variousregisters. The memory unit 1010 may perform the function of temporarilystoring data for which operations are to be performed by the operationunit 1020, result data of performing the operations and addresses wheredata for performing of the operations are stored.

The memory unit 1010 may include one or more of the above-describedsemiconductor devices in accordance with the implementations. Forexample, the memory unit 1010 may include a plurality of buried gatesformed in a substrate; open parts formed in the substrate on both sidesof the buried gate; isolation layers each formed between a sidewall ofthe open part and a sidewall of the buried gate; source/drain regionsformed in the substrate under the respective open parts; and contactplugs buried in the respective open parts. Through this, the depth ofthe open parts in which the contact plugs are formed can be increasedbecause the isolation layers are disposed between the sidewalls of theopen parts and the sidewalls of the buried gates. Accordingly, thistechnology is advantageous in that a signal transfer characteristic canbe improved and the deterioration of characteristics and reliabilityattributable to the overlapping of the contact plug with the buried gatecan be prevented. As a consequence, the microprocessor 1000 can improvea signal transfer characteristic the deterioration of characteristicsand reliability can be prevented.

The operation unit 1020 may perform four arithmetical operations orlogical operations according to results that the control unit 1030decodes commands. The operation unit 1020 may include at least onearithmetic logic unit (ALU) and so on.

The control unit 1030 may receive signals from the memory unit 1010, theoperation unit 1020 and an external device of the microprocessor 1000,perform extraction, decoding of commands, and controlling input andoutput of signals of the microprocessor 1000, and execute processingrepresented by programs.

The microprocessor 1000 according to the present implementation mayadditionally include a cache memory unit 1040 which can temporarilystore data to be inputted from an external device other than the memoryunit 1010 or to be outputted to an external device. In this case, thecache memory unit 1040 may exchange data with the memory unit 1010, theoperation unit 1020 and the control unit 1030 through a bus interface1050.

FIG. 9 is an example of configuration diagram of a processorimplementing memory circuitry based on the disclosed technology.

Referring to FIG. 9, a processor 1100 may improve performance andrealize multi-functionality by including various functions other thanthose of a microprocessor which performs tasks for controlling andtuning a series of processes of receiving data from various externaldevices, processing the data, and outputting processing results toexternal devices. The processor 1100 may include a core unit 1110 whichserves as the microprocessor, a cache memory unit 1120 which serves tostoring data temporarily, and a bus interface 1130 for transferring databetween internal and external devices. The processor 1100 may includevarious system-on-chips (SoCs) such as a multi-core processor, a graphicprocessing unit (GPU) and an application processor (AP).

The core unit 1110 of the present implementation is a part whichperforms arithmetic logic operations for data inputted from an externaldevice, and may include a memory unit 1111, an operation unit 1112 and acontrol unit 1113.

The memory unit 1111 is a part which stores data in the processor 1100,as a processor register, a register or the like. The memory unit 1111may include a data register, an address register, a floating pointregister and so on. Besides, the memory unit 1111 may include variousregisters. The memory unit 1111 may perform the function of temporarilystoring data for which operations are to be performed by the operationunit 1112, result data of performing the operations and addresses wheredata for performing of the operations are stored. The operation unit1112 is a part which performs operations in the processor 1100. Theoperation unit 1112 may perform four arithmetical operations, logicaloperations, according to results that the control unit 1113 decodescommands, or the like. The operation unit 1112 may include at least onearithmetic logic unit (ALU) and so on. The control unit 1113 may receivesignals from the memory unit 1111, the operation unit 1112 and anexternal device of the processor 1100, perform extraction, decoding ofcommands, controlling input and output of signals of processor 1100, andexecute processing represented by programs.

The cache memory unit 1120 is a part which temporarily stores data tocompensate for a difference in data processing speed between the coreunit 1110 operating at a high speed and an external device operating ata low speed. The cache memory unit 1120 may include a primary storagesection 1121, a secondary storage section 1122 and a tertiary storagesection 1123. In general, the cache memory unit 1120 includes theprimary and secondary storage sections 1121 and 1122, and may includethe tertiary storage section 1123 in the case where high storagecapacity is required. As the occasion demands, the cache memory unit1120 may include an increased number of storage sections. That is tosay, the number of storage sections which are included in the cachememory unit 1120 may be changed according to a design. The speeds atwhich the primary, secondary and tertiary storage sections 1121, 1122and 1123 store and discriminate data may be the same or different. Inthe case where the speeds of the respective storage sections 1121, 1122and 1123 are different, the speed of the primary storage section 1121may be largest. At least one storage section of the primary storagesection 1121, the secondary storage section 1122 and the tertiarystorage section 1123 of the cache memory unit 1120 may include one ormore of the above-described semiconductor devices in accordance with theimplementations. For example, the cache memory unit 1120 may include aplurality of buried gates formed in a substrate; open parts formed inthe substrate on both sides of the buried gate; isolation layers eachformed between a sidewall of the open part and a sidewall of the buriedgate; source/drain regions formed in the substrate under the respectiveopen parts; and contact plugs buried in the respective open parts.Through this, the depth of the open parts in which the contact plugs areformed can be increased because the isolation layers are disposedbetween the sidewalls of the open parts and the sidewalls of the buriedgates. Accordingly, this technology is advantageous in that a signaltransfer characteristic can be improved and the deterioration ofcharacteristics and reliability attributable to the overlapping of thecontact plug with the buried gate can be prevented. As a consequence,the processor 1100 can improve a signal transfer characteristic thedeterioration of characteristics and reliability can be prevented.

Although it was shown in FIG. 9 that all the primary, secondary andtertiary storage sections 1121, 1122 and 1123 are configured inside thecache memory unit 1120, it is to be noted that all the primary,secondary and tertiary storage sections 1121, 1122 and 1123 of the cachememory unit 1120 may be configured outside the core unit 1110 and maycompensate for a difference in data processing speed between the coreunit 1110 and the external device. Meanwhile, it is to be noted that theprimary storage section 1121 of the cache memory unit 1120 may bedisposed inside the core unit 1110 and the secondary storage section1122 and the tertiary storage section 1123 may be configured outside thecore unit 1110 to strengthen the function of compensating for adifference in data processing speed. In another implementation, theprimary and secondary storage sections 1121, 1122 may be disposed insidethe core units 1110 and tertiary storage sections 1123 may be disposedoutside core units 1110.

The bus interface 1130 is a part which connects the core unit 1110, thecache memory unit 1120 and external device and allows data to beefficiently transmitted.

The processor 1100 according to the present implementation may include aplurality of core units 1110, and the plurality of core units 1110 mayshare the cache memory unit 1120. The plurality of core units 1110 andthe cache memory unit 1120 may be directly connected or be connectedthrough the bus interface 1130. The plurality of core units 1110 may beconfigured in the same way as the above-described configuration of thecore unit 1110. In the case where the processor 1100 includes theplurality of core unit 1110, the primary storage section 1121 of thecache memory unit 1120 may be configured in each core unit 1110 incorrespondence to the number of the plurality of core units 1110, andthe secondary storage section 1122 and the tertiary storage section 1123may be configured outside the plurality of core units 1110 in such a wayas to be shared through the bus interface 1130. The processing speed ofthe primary storage section 1121 may be larger than the processingspeeds of the secondary and tertiary storage section 1122 and 1123. Inanother implementation, the primary storage section 1121 and thesecondary storage section 1122 may be configured in each core unit 1110in correspondence to the number of the plurality of core units 1110, andthe tertiary storage section 1123 may be configured outside theplurality of core units 1110 in such a way as to be shared through thebus interface 1130.

The processor 1100 according to the present implementation may furtherinclude an embedded memory unit 1140 which stores data, a communicationmodule unit 1150 which can transmit and receive data to and from anexternal device in a wired or wireless manner, a memory control unit1160 which drives an external memory device, and a media processing unit1170 which processes the data processed in the processor 1100 or thedata inputted from an external input device and outputs the processeddata to an external interface device and so on. Besides, the processor1100 may include a plurality of various modules and devices. In thiscase, the plurality of modules which are added may exchange data withthe core units 1110 and the cache memory unit 1120 and with one another,through the bus interface 1130.

The embedded memory unit 1140 may include not only a volatile memory butalso a nonvolatile memory. The volatile memory may include a DRAM(dynamic random access memory), a mobile DRAM, an SRAM (static randomaccess memory), and a memory with similar functions to above mentionedmemories, and so on. The nonvolatile memory may include a ROM (read onlymemory), a NOR flash memory, a NAND flash memory, a phase change randomaccess memory (PRAM), a resistive random access memory (RRAM), a spintransfer torque random access memory (STTRAM), a magnetic random accessmemory (MRAM), a memory with similar functions.

The communication module unit 1150 may include a module capable of beingconnected with a wired network, a module capable of being connected witha wireless network and both of them. The wired network module mayinclude a local area network (LAN), a universal serial bus (USB), anEthernet, power line communication (PLC) such as various devices whichsend and receive data through transmit lines, and so on. The wirelessnetwork module may include Infrared Data Association (IrDA), codedivision multiple access (CDMA), time division multiple access (TDMA),frequency division multiple access (FDMA), a wireless LAN, Zigbee, aubiquitous sensor network (USN), Bluetooth, radio frequencyidentification (RFID), long term evolution (LTE), near fieldcommunication (NFC), a wireless broadband Internet (Wibro), high speeddownlink packet access (HSDPA), wideband CDMA (WCDMA), ultra wideband(UWB) such as various devices which send and receive data withouttransmit lines, and so on.

The memory control unit 1160 is to administrate and process datatransmitted between the processor 1100 and an external storage deviceoperating according to a different communication standard. The memorycontrol unit 1160 may include various memory controllers, for example,devices which may control IDE (Integrated Device Electronics), SATA(Serial Advanced Technology Attachment), SCSI (Small Computer SystemInterface), RAID (Redundant Array of Independent Disks), an SSD (solidstate disk), eSATA (External SATA), PCMCIA (Personal Computer MemoryCard International Association), a USB (universal serial bus), a securedigital (SD) card, a mini secure digital (mSD) card, a micro securedigital (micro SD) card, a secure digital high capacity (SDHC) card, amemory stick card, a smart media (SM) card, a multimedia card (MMC), anembedded MMC (eMMC), a compact flash (CF) card, and so on.

The media processing unit 1170 may process the data processed in theprocessor 1100 or the data inputted in the forms of image, voice andothers from the external input device and output the data to theexternal interface device. The media processing unit 1170 may include agraphic processing unit (GPU), a digital signal processor (DSP), a highdefinition audio device (HD audio), a high definition multimediainterface (HDMI) controller, and so on.

FIG. 10 is an example of configuration diagram of a system implementingmemory circuitry based on the disclosed technology.

Referring to FIG. 10, a system 1200 as an apparatus for processing datamay perform input, processing, output, communication, storage, etc. toconduct a series of manipulations for data. The system 1200 may includea processor 1210, a main memory device 1220, an auxiliary memory device1230, an interface device 1240, and so on. The system 1200 of thepresent implementation may be various electronic systems which operateusing processors, such as a computer, a server, a PDA (personal digitalassistant), a portable computer, a web tablet, a wireless phone, amobile phone, a smart phone, a digital music player, a PMP (portablemultimedia player), a camera, a global positioning system (GPS), a videocamera, a voice recorder, a telematics, an audio visual (AV) system, asmart television, and so on.

The processor 1210 may decode inputted commands and processes operation,comparison, etc. for the data stored in the system 1200, and controlsthese operations. The processor 1210 may include a microprocessor unit(MPU), a central processing unit (CPU), a single/multi-core processor, agraphic processing unit (GPU), an application processor (AP), a digitalsignal processor (DSP), and so on.

The main memory device 1220 is a storage which can temporarily store,call and execute program codes or data from the auxiliary memory device1230 when programs are executed and can conserve memorized contents evenwhen power supply is cut off. The main memory device 1220 may includeone or more of the above-described semiconductor devices in accordancewith the implementations. For example, the main memory device 1220 mayinclude a plurality of buried gates formed in a substrate; open partsformed in the substrate on both sides of the buried gate; isolationlayers each formed between a sidewall of the open part and a sidewall ofthe buried gate; source/drain regions formed in the substrate under therespective open parts; and contact plugs buried in the respective openparts. Through this, the depth of the open parts in which the contactplugs are formed can be increased because the isolation layers aredisposed between the sidewalls of the open parts and the sidewalls ofthe buried gates. Accordingly, this technology is advantageous in that asignal transfer characteristic can be improved and the deterioration ofcharacteristics and reliability attributable to the overlapping of thecontact plug with the buried gate can be prevented. As a consequence,the system 1200 can improve a signal transfer characteristic thedeterioration of characteristics and reliability can be prevented.

Also, the main memory device 1220 may further include a static randomaccess memory (SRAM), a dynamic random access memory (DRAM), and so on,of a volatile memory type in which all contents are erased when powersupply is cut off. Unlike this, the main memory device 1220 may notinclude the semiconductor devices according to the implementations, butmay include a static random access memory (SRAM), a dynamic randomaccess memory (DRAM), and so on, of a volatile memory type in which allcontents are erased when power supply is cut off.

The auxiliary memory device 1230 is a memory device for storing programcodes or data. While the speed of the auxiliary memory device 1230 isslower than the main memory device 1220, the auxiliary memory device1230 can store a larger amount of data. The auxiliary memory device 1230may include one or more of the above-described semiconductor devices inaccordance with the implementations. For example, the auxiliary memorydevice 1230 may include a plurality of buried gates formed in asubstrate; open parts formed in the substrate on both sides of theburied gate; isolation layers each formed between a sidewall of the openpart and a sidewall of the buried gate; source/drain regions formed inthe substrate under the respective open parts; and contact plugs buriedin the respective open parts. Through this, the depth of the open partsin which the contact plugs are formed can be increased because theisolation layers are disposed between the sidewalls of the open partsand the sidewalls of the buried gates. Accordingly, this technology isadvantageous in that a signal transfer characteristic can be improvedand the deterioration of characteristics and reliability attributable tothe overlapping of the contact plug with the buried gate can beprevented. As a consequence, the system 1200 can improve a signaltransfer characteristic the deterioration of characteristics andreliability can be prevented.

Also, the auxiliary memory device 1230 may further include a datastorage system (see the reference numeral 1300 of FIG. 10) such as amagnetic tape using magnetism, a magnetic disk, a laser disk usingoptics, a magneto-optical disc using both magnetism and optics, a solidstate disk (SSD), a USB memory (universal serial bus memory), a securedigital (SD) card, a mini secure digital (mSD) card, a micro securedigital (micro SD) card, a secure digital high capacity (SDHC) card, amemory stick card, a smart media (SM) card, a multimedia card (MMC), anembedded MMC (eMMC), a compact flash (CF) card, and so on. Unlike this,the auxiliary memory device 1230 may not include the semiconductordevices according to the implementations, but may include data storagesystems (see the reference numeral 1300 of FIG. 10) such as a magnetictape using magnetism, a magnetic disk, a laser disk using optics, amagneto-optical disc using both magnetism and optics, a solid state disk(SSD), a USB memory (universal serial bus memory), a secure digital (SD)card, a mini secure digital (mSD) card, a micro secure digital (microSD) card, a secure digital high capacity (SDHC) card, a memory stickcard, a smart media (SM) card, a multimedia card (MMC), an embedded MMC(eMMC), a compact flash (CF) card, and so on.

The interface device 1240 may be to perform exchange of commands anddata between the system 1200 of the present implementation and anexternal device. The interface device 1240 may be a keypad, a keyboard,a mouse, a speaker, a mike, a display, various human interface devices(HIDs), a communication device, and so on. The communication device mayinclude a module capable of being connected with a wired network, amodule capable of being connected with a wireless network and both ofthem. The wired network module may include a local area network (LAN), auniversal serial bus (USB), an Ethernet, power line communication (PLC),such as various devices which send and receive data through transmitlines, and so on. The wireless network module may include Infrared DataAssociation (IrDA), code division multiple access (CDMA), time divisionmultiple access (TDMA), frequency division multiple access (FDMA), awireless LAN, Zigbee, a ubiquitous sensor network (USN), Bluetooth,radio frequency identification (RFID), long term evolution (LTE), nearfield communication (NFC), a wireless broadband Internet (Wibro), highspeed downlink packet access (HSDPA), wideband CDMA (WCDMA), ultrawideband (UWB), such as various devices which send and receive datawithout transmit lines, and so on.

FIG. 11 is an example of configuration diagram of a data storage systemimplementing memory circuitry based on the disclosed technology.

Referring to FIG. 11, a data storage system 1300 may include a storagedevice 1310 which has a nonvolatile characteristic as a component forstoring data, a controller 1320 which controls the storage device 1310,an interface 1330 for connection with an external device, and atemporary storage device 1340 for storing data temporarily. The datastorage system 1300 may be a disk type such as a hard disk drive (HDD),a compact disc read only memory (CDROM), a digital versatile disc (DVD),a solid state disk (SSD), and so on, and a card type such as a USBmemory (universal serial bus memory), a secure digital (SD) card, a minisecure digital (mSD) card, a micro secure digital (micro SD) card, asecure digital high capacity (SDHC) card, a memory stick card, a smartmedia (SM) card, a multimedia card (MMC), an embedded MMC (eMMC), acompact flash (CF) card, and so on.

The storage device 1310 may include a nonvolatile memory which storesdata semi-permanently. The nonvolatile memory may include a ROM (readonly memory), a NOR flash memory, a NAND flash memory, a phase changerandom access memory (PRAM), a resistive random access memory (RRAM), amagnetic random access memory (MRAM), and so on.

The controller 1320 may control exchange of data between the storagedevice 1310 and the interface 1330. To this end, the controller 1320 mayinclude a processor 1321 for performing an operation for, processingcommands inputted through the interface 1330 from an outside of the datastorage system 1300 and so on.

The interface 1330 is to perform exchange of commands and data betweenthe data storage system 1300 and the external device. In the case wherethe data storage system 1300 is a card type, the interface 1330 may becompatible with interfaces which are used in devices, such as a USBmemory (universal serial bus memory), a secure digital (SD) card, a minisecure digital (mSD) card, a micro secure digital (micro SD) card, asecure digital high capacity (SDHC) card, a memory stick card, a smartmedia (SM) card, a multimedia card (MMC), an embedded MMC (eMMC), acompact flash (CF) card, and so on, or be compatible with interfaceswhich are used in devices similar to the above mentioned devices. In thecase where the data storage system 1300 is a disk type, the interface1330 may be compatible with interfaces, such as IDE (Integrated DeviceElectronics), SATA (Serial Advanced Technology Attachment), SCSI (SmallComputer System Interface), eSATA (External SATA), PCMCIA (PersonalComputer Memory Card International Association), a USB (universal serialbus), and so on, or be compatible with the interfaces which are similarto the above mentioned interfaces. The interface 1330 may be compatiblewith one or more interfaces having a different type from each other.

The temporary storage device 1340 can store data temporarily forefficiently transferring data between the interface 1330 and the storagedevice 1310 according to diversifications and high performance of aninterface with an external device, a controller and a system. Thetemporary storage device 1340 for temporarily storing data may includeone or more of the above-described semiconductor devices in accordancewith the implementations. The temporary storage device 1340 may includea resistance variable element which includes a free magnetic layer, atunnel barrier layer and a pinned magnetic layer, and a magneticcorrection layer which is disposed over the resistance variable elementto be separated from the resistance variable element and has amagnetization direction opposite to a magnetization direction of thepinned magnetic layer. Through this, a fabrication process of thestorage device 1310 or the temporary storage device 1340 may become easyand the reliability of the storage device 1310 or the temporary storagedevice 1340 may be improved. As a consequence, a fabrication process ofthe data storage system 1300 may become easy and the reliability of thedata storage system 1300 may be improved.

FIG. 12 is an example of configuration diagram of a memory systemimplementing memory circuitry based on the disclosed technology.

Referring to FIG. 12, a memory system 1400 may include a memory 1410which has a nonvolatile characteristic as a component for storing data,a memory controller 1420 which controls the memory 1410, an interface1430 for connection with an external device, and so on. The memorysystem 1400 may be a card type such as a solid state disk (SSD), a USBmemory (universal serial bus memory), a secure digital (SD) card, a minisecure digital (mSD) card, a micro secure digital (micro SD) card, asecure digital high capacity (SDHC) card, a memory stick card, a smartmedia (SM) card, a multimedia card (MMC), an embedded MMC (eMMC), acompact flash (CF) card, and so on.

The memory 1410 for storing data may include one or more of theabove-described semiconductor devices in accordance with theimplementations. For example, the memory 1410 may include a plurality ofburied gates formed in a substrate; open parts formed in the substrateon both sides of the buried gate; isolation layers each formed between asidewall of the open part and a sidewall of the buried gate;source/drain regions formed in the substrate under the respective openparts; and contact plugs buried in the respective open parts. Throughthis, the depth of the open parts in which the contact plugs are formedcan be increased because the isolation layers are disposed between thesidewalls of the open parts and the sidewalls of the buried gates.Accordingly, this technology is advantageous in that a signal transfercharacteristic can be improved and the deterioration of characteristicsand reliability attributable to the overlapping of the contact plug withthe buried gate can be prevented. As a consequence, the memory system1400 can improve a signal transfer characteristic the deterioration ofcharacteristics and reliability can be prevented.

Also, the memory 1410 according to the present implementation mayfurther include a ROM (read only memory), a NOR flash memory, a NANDflash memory, a phase change random access memory (PRAM), a resistiverandom access memory (RRAM), a magnetic random access memory (MRAM), andso on, which have a nonvolatile characteristic.

The memory controller 1420 may control exchange of data between thememory 1410 and the interface 1430. To this end, the memory controller1420 may include a processor 1421 for performing an operation for andprocessing commands inputted through the interface 1430 from an outsideof the memory system 1400.

The interface 1430 is to perform exchange of commands and data betweenthe memory system 1400 and the external device. The interface 1430 maybe compatible with interfaces which are used in devices, such as a USBmemory (universal serial bus memory), a secure digital (SD) card, a minisecure digital (mSD) card, a micro secure digital (micro SD) card, asecure digital high capacity (SDHC) card, a memory stick card, a smartmedia (SM) card, a multimedia card (MMC), an embedded MMC (eMMC), acompact flash (CF) card, and so on, or be compatible with interfaceswhich are used in devices similar to the above mentioned devices. Theinterface 1430 may be compatible with one or more interfaces having adifferent type from each other.

The memory system 1400 according to the present implementation mayfurther include a buffer memory 1440 for efficiently transferring databetween the interface 1430 and the memory 1410 according todiversification and high performance of an interface with an externaldevice, a memory controller and a memory system. For example, the buffermemory 1440 for temporarily storing data may include one or more of theabove-described semiconductor devices in accordance with theimplementations. The buffer memory 1440 may include a resistancevariable element which includes may include a plurality of buried gatesformed in a substrate; open parts formed in the substrate on both sidesof the buried gate; isolation layers each formed between a sidewall ofthe open part and a sidewall of the buried gate; source/drain regionsformed in the substrate under the respective open parts; and contactplugs buried in the respective open parts. Through this, the depth ofthe open parts in which the contact plugs are formed can be increasedbecause the isolation layers are disposed between the sidewalls of theopen parts and the sidewalls of the buried gates. Accordingly, thistechnology is advantageous in that a signal transfer characteristic canbe improved and the deterioration of characteristics and reliabilityattributable to the overlapping of the contact plug with the buried gatecan be prevented. Through this, a fabrication process of the buffermemory 1440 may become easy and the reliability of the buffer memory1440 may be improved. As a consequence, the memory system 1400 canimprove a signal transfer characteristic the deterioration ofcharacteristics and reliability can be prevented.

Moreover, the buffer memory 1440 according to the present implementationmay further include an SRAM (static random access memory), a DRAM(dynamic random access memory), and so on, which have a volatilecharacteristic, and a phase change random access memory (PRAM), aresistive random access memory (RRAM), a spin transfer torque randomaccess memory (STTRAM), a magnetic random access memory (MRAM), and soon, which have a nonvolatile characteristic. Unlike this, the buffermemory 1440 may not include the semiconductor devices according to theimplementations, but may include an SRAM (static random access memory),a DRAM (dynamic random access memory), and so on, which have a volatilecharacteristic, and a phase change random access memory (PRAM), aresistive random access memory (RRAM), a spin transfer torque randomaccess memory (STTRAM), a magnetic random access memory (MRAM), and soon, which have a nonvolatile characteristic.

As is apparent from the above descriptions, in the semiconductor deviceand the method for fabricating the same in accordance with theimplementations, patterning of a resistance variable element is easy,and it is possible to secure the characteristics of the resistancevariable element.

Features in the above examples of electronic devices or systems in FIGS.8-12 based on the memory devices disclosed in this document may beimplemented in various devices, systems or applications. Some examplesinclude mobile phones or other portable communication devices, tabletcomputers, notebook or laptop computers, game machines, smart TV sets,TV set top boxes, multimedia servers, digital cameras with or withoutwireless communication functions, wrist watches or other wearabledevices with wireless communication capabilities.

While this patent document contains many specifics, these should not beconstrued as limitations on the scope of any invention or of what may beclaimed, but rather as descriptions of features that may be specific toparticular embodiments of particular inventions. Certain features thatare described in this patent document in the context of separateembodiments can also be implemented in combination in a singleembodiment. Conversely, various features that are described in thecontext of a single embodiment can also be implemented in multipleembodiments separately or in any suitable subcombination. Moreover,although features may be described above as acting in certaincombinations and even initially claimed as such, one or more featuresfrom a claimed combination can in some cases be excised from thecombination, and the claimed combination may be directed to asubcombination or variation of a subcombination.

Similarly, while operations are depicted in the drawings in a particularorder, this should not be understood as requiring that such operationsbe performed in the particular order shown or in sequential order, orthat all illustrated operations be performed, to achieve desirableresults. Moreover, the separation of various system components in theembodiments described in this patent document should not be understoodas requiring such separation in all embodiments.

Only a few implementations and examples are described. Otherimplementations, enhancements and variations can be made based on whatis described and illustrated in this patent document.

What is claimed is:
 1. An electronic device comprising a semiconductormemory unit that includes: a substrate; word lines including a pluralityof buried gates formed in the substrate; open parts formed in thesubstrate on two opposing sides of the buried gates; isolation layersformed in the open parts, each isolation layer formed between a sidewallof an open part and a sidewall of a corresponding buried gate; sourceand drain regions formed in the substrate under respective open parts;contact plugs buried in respective open parts; a source line coupledwith the source regions; variable resistance elements coupled withrespective drain regions; and bit lines coupled with respective variableresistance elements.
 2. The electronic device of claim 1, furthercomprising ohmic contact layers formed in the source and drain regionsand exposed to the open parts.
 3. The electronic device of claim 1,wherein each of the buried gates comprises: a trench formed in thesubstrate; a gate insulating layer formed on a surface of the trench; agate electrode formed over the gate insulating layer and configured tobury part of the trench; and a sealing layer formed over the gateelectrode and configured to bury the remaining trench.
 4. The electronicdevice of claim 3, wherein a bottom of the open part is lower than aninterface where the gate electrode comes in contact with the sealinglayer.
 5. The electronic device of claim 4, wherein the isolation layercomprises an insulating layer.
 6. The electronic device of claim 4,wherein the open parts comprise: first open parts formed in thesubstrate on both sides of the buried gate and each configured to have afirst critical dimension; and second open parts formed under the firstopen parts and each configured to have a second critical dimensionsmaller than the first critical dimension.
 7. The electronic device ofclaim 6, wherein the isolation layer comprises a substrate remainingbetween a sidewall of the second open part and a sidewall of the buriedgate.
 8. The electronic device of claim 1, wherein each of the contactplugs comprises a metallic layer.
 9. The electronic device of claim 1,wherein each of the variable resistance elements comprises a stack layerhaving a tunnel barrier layer interposed between two magnetic materiallayers.
 10. The electronic device of claim 1, wherein each of thevariable resistance elements comprises metal oxide.
 11. The electronicdevice of claim 1, wherein each of the variable resistance elementscomprises phase-change materials.
 12. The electronic device according toclaim 1, further comprising a microprocessor which includes: a controlunit configured to receive a signal including a command from an outsideof the microprocessor, and performs extracting, decoding of the command,or controlling input or output of a signal of the microprocessor; anoperation unit configured to perform an operation based on a result thatthe control unit decodes the command; and a memory unit configured tostore data for performing the operation, data corresponding to a resultof performing the operation, or an address of data for which theoperation is performed, wherein the semiconductor memory unit is part ofthe memory unit in the microprocessor.
 13. An electronic devicecomprising a semiconductor circuit that includes: a substrate; trenchesformed in the substrate; conductors located inside the trenches,respectively, to form gate electrodes buried inside the trenches; sourceand drain regions formed in the substrate and adjacent to the trenches;open parts formed above the source and drain regions on opposing sidesof each of the gate electrodes buried inside respective trenches;isolation layers formed inside the open parts and above respectivesource and drain regions, each isolation layer formed between a sidewallof an open part and a sidewall of a gate electrode; and contact plugsburied inside the open parts to provide electrical contacts with thesource and drain regions, respectively, wherein a gate electrode buriedin side a trench and adjacent source and drain regions form atransistor.
 14. The device of claim 13, wherein: the semiconductorcircuit includes a circuit element that is electrically coupled to acontact plug buried inside a respective open part of a transistor. 15.The device of claim 14, wherein: the circuit element includes asemiconductor memory.
 16. The device of claim 15, wherein: thesemiconductor memory includes a variable resistance layer that changes aresistance value to represent stored data.
 17. The device of claim 15,wherein: the semiconductor memory includes a phase-change material. 18.The device of claim 15, wherein: the semiconductor memory includes amagnetic tunnel junction.
 19. The device of claim 14, wherein: thesubstrate includes active regions each having one or more of thetrenches and isolation layers each formed between two active regions toisolate the two active regions.
 20. The device of claim 19, wherein: oneor more of the trenches are formed in the isolation layers.